NEUP CINR-22-27082: Dual Mode High Temperature MEMS Ultrasonic Sensor for Structural Health Monitoring of Liquid Metal Reactor

The objective of this proposal is to build a high temperature Micro-Electro-Mechanical-Systems (MEMS) sensor that delivers structural health monitoring (SHM) of Mechanisms Engineering Test Loop (METL) metallic structural components. The sensor will be made of aluminum nitride as the sensing element and 4H-silicon carbide as the substrate to function near ~650°C. The MEMS sensor will be dual mode by the ability to generate and detect longitudinal and torsional wave modes.

Additional Info

Field	Value
Awarded Institution	University of Illinois at Chicago
PI	Didem Ozevin